Laser Beam Profiler

With our Laser Beam Profilers the intensity distribution of laser beams in the wavelength ranges EUV, UV, VIS and NIR for beam diameters of 1 µm - 100 mm can be recorded and analyzed according to EN ISO norms.

Various different Software tools are suitable for analysis of spots and beam position as well as for the characterization of homogenoeus laser beams. Optional accessories allow for synchronized operation with pulsed lasers and measurement of single pulses.

The detector heads have been optimized using a special surface refinement of the mechanical parts and antireflection coating on the optical elements to reduce the amount of stray light to a minimum.

VIS/NIR Laser Beam Profiler

The CCD Camera based Laser Beam Profiler "Beam Monitor" is optimized for the analysis of collimated laser beams of cw- and pulsed lasers of low output power. Mostly laser beams in the VIS/NIR wavelength range such as those of Nd:YAG- or Diode lasers are typically analyzed with these systems.

The Beam Monitor consists of the Beamlux II software, our standard camera with accesories as well as a neutral density filter set and is quickly set up for a maesurement. With optional accessories these systems can also be used for high power laser beams and focal diameters of less than 10 µm.

UV Laser Beam Profiler

Industrially tested and proven UV Laser Beam Profilers for the use with i.e. excimer and Nd:YAG lasers (3rd, 4th and 5th harmonics) for laser materials processing in semiconductor and display inustries.

The system basically consists of a camera based UV sensitive detector and the Beamlux II advanced software. Dependent on the system's active area beam diameters between 10 µm and 100 mm can be measured.

• Time saving adjustment of optics and resonators
• User friendly support of process monitoring
• On-line analysis and automated documentation
• Reliable connection and data transfer to databases
• Expandable Beamlux II software for beam profile analysis as per EN-ISO norm
• Single pulse resolution for triggered and synchronized operation
• High homogeneity and long-term stability for production processes