Yocto III

Applications:

  • Activation
  • Cleaning
상품코드: 5800252
카테고리:
태그: , ,

설명

Basic Equipment

  • Power Supply: 230 V / 50 – 60 Hz

Gas Supply

  • One process gas through filter
  • Flow through valve (not adjustable)
  • Ventilation through filter

Vacuum 챔버

  • Borosilicate glass (UHP),
  • round 형,
  • Size: approx. ∅ 50 mm, L 150 mm.

Electrodes

  • One pair of electrode on the outside of the vacuum chamber

Control

  • Generator for plasma generation
  • 2 step switch
  • Start button
  • Power switch

Generator

  • Frequency: 100 kHz
  • Power: 0 – 30 W

 Vacuum Pump

  • Dry vacuum pump (without oil)
  • Integrated into the system
  • Suction power: 0,75 m3/h