W 800 mm, H 600 mm, D 500 mm
W 240 mm, H 150 mm, D 240 mm
1 gas channel via MFCs
1 piece (40 kHz)
(optional: 13.56 MHz or 2.45 GHz)
PC control (Windows) with industrial field bus
The system can be integrated into a production line.
This system is also available as a kit.