Pico low-pressure plasma system

Pico plasma systems can be combined in various forms, as in a modular system. The following provides an overview of the most common options in conjunction with Pico plasma systems. Pico plasma systems are used primarily in the following areas:

  • Analytics (REM, TEM)
  • Archeology
  • Automotive
  • Research and Development departments
  • Semiconductor technology
  • Small batch production
  • Plastics
  • Medical technology
  • Micro-system technology
  • Sensors
  • Sterilization
  • Textiles
상품코드: 5800490
카테고리:
태그: , ,

Basic equipment

  • The housing size varies depending on the components/options
  • Chamber volumes: 4 – 15 litres, depending on the version
  • Power supply: 230 V for table top systems, 400 V/3-phase for stand-alone systems

Gas supply

  • Needle valve
  • Mass Flow Controllers (MFCs)

Vacuum chambers

  • Stainless steel, round, with lid
    (approx. ∅ 150 mm, L 320 mm or L 600 mm) or
  • Stainless steel, rectangular, with hinged door 
    (approx. W 160 x H 160 x D 325 or 600mm)
  • Aluminium, round, with lid or hinged door 
    (approx. ∅ 130 mm, L 300 mm or L 600 mm)
  • Quartz glass (UHP), round, with lid or hinged door 
    (approx. ∅ 130 mm, L 300 mm or L 600 mm)
  • Borosilicate glass (UHP), round, with lid
    (approx. ∅130 mm, L 300 mm or L 600 mm)

Loading

  • Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass

Electrodes

  • Single, or multiple levels
  • RIE

Control

  • Semi-automatic
  • PCCE control (Microsoft Windows CE)
  • PC control (Microsoft Windows POS Ready 2009)

Pressure measurement

  • Pirani
  • Baratron (for corrosive gas version)

Timer

  • Digital

Generators

Frequencies: 40 kHz: Power 0 – 200 W; 0 -1000 W
13.56 MHz: Power 0 – 50 W; 0 – 100 W; 0 – 300 W
2.45 GHz: Power 0 – 300 W

 

All generators are continuously adjustable from 0 – 100 %

Vacuum pumps

  • In different sizes and from various manufacturers (as required with activated carbon filter)