Nano low-pressure plasma system

Nano plasma systems can be combined in various forms, as in a modular system. The following provides an overview of the most common options in conjunction with Nano plasma systems. Nano plasma systems are used primarily in the following areas:

Analytics
Archeology
Automotive
Research and Development departments
Semiconductor technology
Small batch production
Plastics
Medical technology
Micro-system technology
Sensors
Sterilization
Textiles

상품코드: 5800492
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설명

Basic equipment

  • The housing size varies depending on the components/options
  • Chamber volumes: 18 – 36 litres, depending on the version
  • Power supply: 230 V for table top devices, 400 V/3-phase for stand-alone devices

Gas supply

  • Needle valve
  • Mass Flow Controllers (MFCs)

Vacuum chambers

  • Stainless steel, round, with lid (approx. ∅ 267 mm, L 420 mm or L 600 mm) or
  • Stainless steel, rectangular, hinged door(approx. W 240 mm x D 420 mm or 600 mm)
  • Aluminium, round, with lid or hinged door(approx. ∅ 240 mm, L 400 mm or L 600 mm)
  • Quartz glass (UHP), round, with lid or hinged door (approx. ∅ 240 mm, L 400 mm or L 600 mm)
  • Borosilicate glass (UHP), round, with lid or hinged door (approx.∅ 240 mm, L 400 mm or L 600 mm)

Loading

  • Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass

Electrodes

  • Single or multiple levels
  • RIE

Control

  • Semi-automatic
  • PCCE control (Microsoft Windows CE)
  • PC control (Microsoft Windows POS Ready 2009)

Pressure measurement

  • Pirani
  • Baratron (for corrosive gas version)

Timer

  • Digital

Generators

Frequencies: 40 kHz: Power 0 – 300 W; 0 – 1000 W
13.56 MHz: Power 0 – 100 W; 0 – 300 W
2.45 GHz: Power 0 – 600 W;

 

All generators are continuously adjustable from 0 – 100%

Vacuum pumps

  • In different sizes and from various manufacturers (with active carbon filter, if required)