Low-pressure plasma system Tetra 100 PC / PCCE

Tetra 100 plasma systems can be combined in various forms, as in a modular system. The following provides an overview of the most common options in conjunction with Tetra 100 plasma systems. Tetra 100 plasma systems are used primarily in the following areas:

  • Analytics (REM, TEM)
  • Archeology
  • Automotive
  • Biotechnology
  • Elastomer technology
  • Electronics
  • Electron microscopy
  • Precision technology
  • Research and development
  • Semiconductor technology
  • Small batch production
  • Plastics
  • Medical technology
  • Micro-system technology
  • Solar technology
  • Textiles
상품코드: 5800599
카테고리:
태그: , ,

설명

Basic equipment

  • The housing size varies depending on the components/options
  • Chamber volumes: 80 – 100 litres, depending on the version
  • Power supply: 230 V or 400 V/3-phase

Gas supply

  • Mass Flow Controllers (MFCs)

Vacuum chamber

  • Stainless steel, round, hinged door
    (approx. ∅ 400 mm, L 625 mm)
  • Stainless steel, rectangular, hinged door
    (approx. W 400 x H 400 mm D 625 mm)

Loading

  • Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass

Electrodes

  • Single, or multiple levels
  • RIE electrodes with gas shower

Control

  • PCCE control (Microsoft Windows CE)
  • PC control (Microsoft Windows POS Ready 2009)

Pressure measurement

  • Pirani
  • Baratron (for corrosive gas version)

Timer

  • Digital

Generators

Frequencies: 40 kHz: Power 0 – 1000 W; 0 – 1500 W; 0 – 2500 W
13.56 MHz: Power 0 – 300 W; 0 – 600 W; 0 – 1000 W
2.45 GHz: Power 0 – 1200 W

 

All generators are continuously adjustable from 0 – 100%

Vacuum pumps

  • In different sizes and from various manufacturers (as required with activated carbon filter)