Forschungsanlage Plasma System Bell Jar 35

The Bell Jar 35 plasma system is a research facility that has been developed for scientific experiments. The system is suitable for thermal evaporation, sputtering, electron beam evaporation, metallic coatings for SEM (Scanning Electron Microscope) sample preparation, as well as for classical plasma processes.

상품코드: 5800610
카테고리:
태그: , ,

Basic equipment

  • Housing approx. W 560 mm x H 1640 mm x D 620 mm
  • Chamber volume: approx. 35 litres
  • Power supply: 230 V/16 A

Gas supply

  • 3 Mass Flow Controllers (MFCs)

Vacuum chambers

  • Glass Jar made of borosilicate glass
    ∅ 315 mm x H 500 mm

Sputter source

  • 1 sputter source 2″ – 3″ + shutter
    (with optional flue and gas inlet for reactive processes)

Substrate holder

  • ∅ 140 mm (optional rotatable substrate heating, substrate cooling)
  • Switchable as an electrode for plasma pretreatment (cleaning, activating, etching)

Control

  • PC control (Microsoft Windows XPe)

Pressure measurement

  • Pirani

Generators

Frequencies: 40 kHz: Power 0 – 500 W
13.56 MHz: Power 0 – 300 W

 

DC bias voltage source or unipolar pulsed

Power max. 300 W
Voltage max. 600 V DC

All generators are continuously adjustable from 0 – 100 %

Vacuum pumps

  • In different sizes and from various manufacturers (as required with activated carbon filter)