Femto low-pressure plasma system (plasma cleaner)

Femto plasma systems can be combined in various forms, as in a modular system. The following provides an overview of the most common options in conjunction with Femto plasma systems. Femto plasma systems are used primarily in the following areas:

  • Analytics
  • Archeology
  • Automotive
  • Research and Development departments
  • Semiconductor technology
  • Small batch production
  • Plastics
  • Medical technology
  • Micro-system technology
  • Sensors
  • Sterilization
  • Textiles
상품코드: 5800487
카테고리:
태그: , ,

설명

Basic equipment

  • The housing size varies depending on the components/options
  • Chamber volumes: 1.9 – 6 litres, depending on the version
  • Power supply: 230 V for table top devices, 400 V/3-phase for stand-alone devices

Gas supply

  • Needle valve
  • Mass Flow Controllers (MFCs)

Vacuum chambers

  • Stainless steel, round with lid
    (approx. ∅ 100 mm, L 278 mm or L 600 mm)
  • Stainless steel, rectangular, hinged door 
    (approx. W 103 x D 285 x H 103)
  • Aluminium, round, with lid or hinged door 
    (approx. ∅ 95 mm, L 280 mm or L 600 mm)
  • Quartz glass (UHP), round, with lid or hinged door
    (approx. ∅ 95 mm, L 280 mm or L 600 mm)
  • Borosilicate glass (UHP), round, with lid or hinged door
    (approx. ∅ 95 mm, L 280 mm or L 600 mm)

Loading

  • Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass

Electrodes

  • Single, or multiple levels
  • RIE

Controls

  • Semi-automatic
  • PCCE control (Microsoft Windows CE)
  • PC control (Microsoft Windows POS Ready 2009)

Pressure measurement

  • Pirani
  • Baratron (for corrosive gas version)

Timer

  • Digital

Generators

Frequencies: 40 kHz: Power 0 – 100 W; 0 – 1000 W
13.56 MHz; Power 0 – 50 W; 0 – 300 W
12.45 GHz: Power 0 – 100 W; 0 – 300 W

 

All generators are continuously adjustable from 0 – 100%

Vacuum pumps

  • In different sizes and from various manufacturers (as required with activated carbon filter)